15‐4: New Gen. 6 Exposure Tools for 1.2 μm Resolution. - Yabu, Nobuhiko; Hakko, Manabu; Takasaki, Koichi; Okubo, Toru; Oyanagi, Takeo; Ando, Miwako; Terashi, Takaaki; Izumi, Nozomu; Nagano, Kouhei; Osaki, Yoshinori (SID Symposium Digest of Technical Papers, 2020)