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Academic Journal
TECHNOLOGICAL TECHNIQUES OF Al-Al2O3 MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS
V. A. Sokol, D. L. Shimanovich, G. V. Litvinovich
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 0, Iss 8, Pp 44-49 (2019)
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| Titel | TECHNOLOGICAL TECHNIQUES OF Al-Al2O3 MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS |
|---|---|
| Författarna | V. A. Sokol, D. L. Shimanovich, G. V. Litvinovich |
| Utgivningsår |
2019
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| Källa |
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 0, Iss 8, Pp 44-49 (2019)
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| Beskrivning |
Thus, Al-Al2O3 structures characteristic features of which are the considerable height (300 - 450 μm ) of contact pads and conducting lines, the high thickness (150 - 600 μm ) of insulating anodic alumina with high breakdown voltages between the contact pads (up to 8 kV) were made in the present work. Such structures may be used in power electromechanical systems. Methods of the high-speed anodization, of the deep anodization and chemical etching were investigated to provide practically vertical walls in the Al-Al2O3 system.
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| Dokumenttyp |
article
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| Språk |
Russian
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| Information om utgivare |
Educational institution «Belarusian State University of Informatics and Radioelectronics», 2019.
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| Ämnestermer | |
