capacitive sensors, computational electromagnetics, displacement measurement, numerical analysis, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

Abstract To meet the demand for non‐contact displacement detection of magnetic levitation spheres, single‐ended and differential variable electrode distance capacitance displacement detection schemes are designed in this paper. For these two schemes, finite element simulation models are established in COMSOL Multiphysics software to obtain the relationship between the test capacitance and the displacement of the magnetic levitation sphere. In the single‐ended scheme, there is a non‐linear relationship between the test capacitance and the position of the levitated sphere, and this non‐linearity becomes more significant as the sphere moves away from the electrode plate. In contrast, in the differential scheme, the test capacitance and the displacement of the levitated sphere follow a linear relationship, but the test sensitivity decreases with the expansion of the measuring range. The simulation results of the differential scheme have been verified by building a spherical displacement detection simulator, and thanks to the mature development of capacitive detection circuits, the scheme is expected to achieve better than nanoscale displacement detection resolution in the 6.6 mm displacement range of a magnetic levitation sphere in the future.