Virtual Metrology Modeling for CVD Film Thickness With Lasso-Gaussian Process Regression - Yan, Shijia; Luo, Cong; Wang, Sen; Ding, Shenglan; Li, Lei; Ai, Juan; Sheng, Qiang; Xia, Qing; Li, Zhi; Chen, Qilin; Li, Shilin; Dai, Hongwei; et al. (2023 China Semiconductor Technology International Conference (CSTIC), Semiconductor Technology International Conference (CSTIC), 2023 China, 2023)