200nm-pitched, Superconducting Nb Interconnects for Cryo-CMOS Application - Iguchi, N.; Numata, H.; Tanaka, M.; Okamoto, K.; Tanaka, T.; Uchida, K.; Ishikuro, H.; Sakamoto, T.; Tada, M. (2024 IEEE International Interconnect Technology Conference (IITC), Interconnect Technology Conference (IITC), 2024 IEEE International, 2024)