Improvement of P-base contact resistance in power MOSFETs and its impact on avalanche capability - Miyamoto, Keisuke; Ishi, Daichi; Hirose, Takayuki; Kishimoto, Hiroyuki; Sato, Kazuyuki; Kachi, Tsuyoshi; Katou, Hiroaki (2024 International Symposium on Semiconductor Manufacturing (ISSM), Semiconductor Manufacturing (ISSM), 2024 International Symposium on, 2024)