Thin Piezoelectric Films for Micromechanical Systems

Gurin, Sergey A., Pecherskaya, Ekaterina A., Spitsyna, Kseniya Yu., Fimin, Andrey V., Artamonov, Dmitriy V., Shepeleva, Anastasiya E.

2020 Moscow Workshop on Electronic and Networking Technologies (MWENT) Electronic and Networking Technologies (MWENT), 2020 Moscow Workshop on. :1-5 Mar, 2020

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Title	Thin Piezoelectric Films for Micromechanical Systems
Authors	Gurin, Sergey A., Pecherskaya, Ekaterina A., Spitsyna, Kseniya Yu., Fimin, Andrey V., Artamonov, Dmitriy V., Shepeleva, Anastasiya E.
Source	2020 Moscow Workshop on Electronic and Networking Technologies (MWENT) Electronic and Networking Technologies (MWENT), 2020 Moscow Workshop on. :1-5 Mar, 2020

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