APA (7th ed.) Citation

Zhang, X., Zeng, Z., Cao, Y., Zhang, Y., Bao, Y., Zhou, H., . . . Zhang, Y. (2022). Research on the oxidation behavior of Titanium nitride thin films and resistance simulation. 2022 China Semiconductor Technology International Conference (CSTIC), Semiconductor Technology International Conference (CSTIC), 2022 China, 1-4. https://doi.org/10.1109/CSTIC55103.2022.9856880

Chicago Style (17th ed.) Citation

Zhang, Xiaotong, Zhaoqin Zeng, Yanpeng Cao, Yanyan Zhang, Yu Bao, Haifeng Zhou, Jingxun Fang, and Yu Zhang. "Research on the Oxidation Behavior of Titanium Nitride Thin Films and Resistance Simulation." 2022 China Semiconductor Technology International Conference (CSTIC), Semiconductor Technology International Conference (CSTIC), 2022 China 2022: 1-4. https://doi.org/10.1109/CSTIC55103.2022.9856880.

MLA (9th ed.) Citation

Zhang, Xiaotong, et al. "Research on the Oxidation Behavior of Titanium Nitride Thin Films and Resistance Simulation." 2022 China Semiconductor Technology International Conference (CSTIC), Semiconductor Technology International Conference (CSTIC), 2022 China, 2022, pp. 1-4, https://doi.org/10.1109/CSTIC55103.2022.9856880.