APA (7th ed.) Citation

Wang, L., Zhou, Y., Wang, J., & Liu, X. (2019). Effects of ratio of hydrogen flow on microstructure of hydrogenated microcrystalline silicon films deposited by magnetron sputtering at 100 °C. Journal of Central South University: Science & Technology of Mining and Metallurgy, 26(10), 2661-2667. https://doi.org/10.1007/s11771-019-4203-7

Chicago Style (17th ed.) Citation

Wang, Lin-qing, Yong-tao Zhou, Jun-jun Wang, and Xue-qin Liu. "Effects of Ratio of Hydrogen Flow on Microstructure of Hydrogenated Microcrystalline Silicon Films Deposited by Magnetron Sputtering at 100 °C." Journal of Central South University: Science & Technology of Mining and Metallurgy 26, no. 10 (2019): 2661-2667. https://doi.org/10.1007/s11771-019-4203-7.

MLA (9th ed.) Citation

Wang, Lin-qing, et al. "Effects of Ratio of Hydrogen Flow on Microstructure of Hydrogenated Microcrystalline Silicon Films Deposited by Magnetron Sputtering at 100 °C." Journal of Central South University: Science & Technology of Mining and Metallurgy, vol. 26, no. 10, 2019, pp. 2661-2667, https://doi.org/10.1007/s11771-019-4203-7.