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Source: | AIP Advances, Vol 9, Iss 2, Pp 025211-025211-6 (2019) |
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Publisher Information: | AIP Publishing LLC, 2019. |
Publication Year: | 2019 |
Subject Terms: | Physics, QC1-999 |
Description: |
This paper presents an enhanced stability strategy for the sense mode of a force-rebalanced closed-loop polysilicon micro-hemispherical reso
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Database: | Directory of Open Access Journals |