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Source: | AIP Advances, Vol 14, Iss 8, Pp 085012-085012-6 (2024) |
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Publisher Information: | AIP Publishing LLC, 2024. |
Publication Year: | 2024 |
Subject Terms: | Physics, QC1-999 |
Description: |
Interfacial differences between the Hf0.5Zr0.5O2 (HZO) and the top/bottom electrodes caused by the process sequence could lead to the imprin
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Database: | Directory of Open Access Journals |