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Bibliographic Details
Source:
Journal of Central South University: Science & Technology of Mining and Metallurgy
. 26(10):2661-2667
Database:
Springer Nature Journals
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Alternate Title:
氢稀释比对磁控溅射低温(100 °C)沉积氢化微晶硅薄膜微结构特性的影响
Authors:
Wang, Lin-qing
Aff1, Aff2
,
Zhou, Yong-tao
Aff3, Aff4
,
Wang, Jun-jun
Aff3, Aff4
,
Liu, Xue-qin
Aff3, Aff4
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